Publication: Microstructuring system SiO2 /Si with nanosecond pulsed fiber laser
| dc.contributor.author | A. M. Skvortsov | |
| dc.contributor.author | V.P. Veiko | |
| dc.contributor.author | Tu Huynh Cong | |
| dc.contributor.author | R. A. Khaletskiy | |
| dc.date.accessioned | 2026-05-24T16:48:11Z | |
| dc.date.available | 2026-05-24T16:48:11Z | |
| dc.date.issued | 2013-01-01 | |
| dc.description.abstract | Microstructuring system SiO2 /Si with nanosecond pulsed fiber laser | |
| dc.identifier.doi | 10.1117/12.2053266 | |
| dc.identifier.isbn | 0277-786X/ISBN: 9780819499929 | |
| dc.identifier.uri | https://rims.qnu.edu.vn/handle/123456789/4290 | |
| dc.subject | Nanosecond pulsed laser | |
| dc.subject | SiO2/Si system | |
| dc.subject | Microstructuring | |
| dc.title | Microstructuring system SiO2 /Si with nanosecond pulsed fiber laser | |
| dc.type | journal article | |
| dspace.entity.type | Publication | |
| oairecerif.author.affiliation | Truong Dai hoc Quy Nhon | |
| oairecerif.author.affiliation | Truong Dai hoc Quy Nhon | |
| oairecerif.author.affiliation | Truong Dai hoc Quy Nhon | |
| oairecerif.author.affiliation | Truong Dai hoc Quy Nhon |
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