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Microstructuring of silicon single crystals by fiber laser in high-speed scanning mode

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dc.contributor.authorSkvortsov A.M. Trifonova
dc.contributor.authorT.A.
dc.contributor.authorHuynh Kong Tu
dc.date.accessioned2026-06-29T23:40:14Z
dc.date.available2026-06-29T23:40:14Z
dc.date.issued2015-01-01
dc.description.abstractMicrostructuring of silicon single crystals by fiber laser in high-speed scanning mode
dc.identifier.doi10.17586/2226-1494-2015-15-6-1062-1071
dc.identifier.isbn2226-1494
dc.identifier.urihttps://rims.qnu.edu.vn/handle/123456789/10376
dc.subjectSilicon single crystals
dc.subjectHigh-speed scanning
dc.subjectFiber laser
dc.titleMicrostructuring of silicon single crystals by fiber laser in high-speed scanning mode
dc.typejournal article
dspace.entity.typePublication
oairecerif.author.affiliationTruong Dai hoc Quy Nhon
oairecerif.author.affiliationTruong Dai hoc Quy Nhon
oairecerif.author.affiliationTruong Dai hoc Quy Nhon

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