Publication:
Effect of laser micro structuring process on electrophysical properties of SiO2/Si system

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dc.contributor.authorA. M. Skvortsov
dc.contributor.authorR. Khalestkiy
dc.contributor.authorHuynh Cong Tu
dc.date.accessioned2026-05-24T16:48:13Z
dc.date.available2026-05-24T16:48:13Z
dc.date.issued2013-01-01
dc.description.abstractEffect of laser micro structuring process on electrophysical properties of SiO2/Si system
dc.identifier.isbnISSN 2226-1494
dc.identifier.urihttps://rims.qnu.edu.vn/handle/123456789/4320
dc.subjectLaser microstructuring
dc.subjectElectrophysical properties
dc.subjectSiO2/Si
dc.titleEffect of laser micro structuring process on electrophysical properties of SiO2/Si system
dc.typejournal article
dspace.entity.typePublication
oairecerif.author.affiliationTruong Dai hoc Quy Nhon
oairecerif.author.affiliationTruong Dai hoc Quy Nhon
oairecerif.author.affiliationTruong Dai hoc Quy Nhon

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