Publication:
Nanostructured system SiO2/ Si by ArF Excimer Laser Irradiation

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dc.contributor.authorAndrey Petrov
dc.contributor.authorTu Huynh Cong
dc.contributor.authorSkvortsov A.M.
dc.date.accessioned2026-05-24T16:48:11Z
dc.date.available2026-05-24T16:48:11Z
dc.date.issued2013-01-01
dc.description.abstractNanostructured system SiO2/ Si by ArF Excimer Laser Irradiation
dc.identifier.doi10.1117/12.2053278
dc.identifier.isbnISSN: 0277-786X/ISBN: 9780819499929
dc.identifier.urihttps://rims.qnu.edu.vn/handle/123456789/4295
dc.subjectArF Excimer Laser
dc.subjectNanostructured system
dc.subjectSiO2/Si
dc.titleNanostructured system SiO2/ Si by ArF Excimer Laser Irradiation
dc.typejournal article
dspace.entity.typePublication
oairecerif.author.affiliationTruong Dai hoc Quy Nhon
oairecerif.author.affiliationTruong Dai hoc Quy Nhon
oairecerif.author.affiliationTruong Dai hoc Quy Nhon

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